Dþ, Heþ and Hþ sputtering of solid and liquid phase tin

Absolute sputtering yields of Sn in the solid and liquid phases for incident Hþ, Dþ, and Heþ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45 to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation. 2003 Elsevier Science B.V. All rights reserved.